EE/MedE 187 - MEMS/NEMS Technologies for Biomedical Devices

MEMS/NEMS technologies are useful to make advanced devices for such as electronics, optics, sensors, actuators and medicine. This course will emphasize the sciences and fundamentals of selected MEMS/NEMS technologies which enable micro 3D biomedical devices. For example, covered technologies include 3D wet isotropic/anisotropic chemical etching, bulk and surface micromachining (e.g., EDP, KOH and DRIE etching), wafer bonding, micro/nano molding and other advanced packaging techniques. This course covers many MEMS/NEMS devices but will emphasize their biomedical applications such as pressure sensors, microfluidics, accelerometers/gyros, lab-on-chips, micro total-analysis system, neuromodulation devices, biomedical implants, etc.